ArticleNature communications2025
A μGal MOEMS gravimeter designed with free-form anti-springs.
Article in Nature communications, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
6 citing papers in PubMed.
- Device-Level Modeling, Cross-Axis Analysis, and Optical Characterization of a Symmetric Triple-Layer MOEMS Accelerometer.Micromachines · 2026Article
- A Wafer-Level Stacking Scheme Based on Hybrid Etching and Low-Temperature Bonding for High-Performance MEMS Devices.Micromachines · 2026Article
- Deep learning-driven performance prediction and design of high-DoF MEMS resonators.Microsystems & nanoengineering · 2026Article
- Piezoelectric Thin-Film Actuator for Dynamic Tuning of Micro-Optical Cavities.Micromachines · 2026Article
- Force balanced chip scale gravimeter achieving record low self noise of 0.1 μGal/√Hz.Microsystems & nanoengineering · 2026Article
- A nonlinear stiffness softening mechanism for low-bias, high-sensitivity MEMS accelerometers with extended dynamic range.Microsystems & nanoengineering · 2025Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
15 authors.
Funding
Abstract
Gravimeter measures gravitational acceleration, which is valuable for geophysical applications such as hazard forecasting and prospecting. Gravimeters have historically been large and expensive instruments. Micro-Electro-Mechanical-System gravimeters feature small size and low cost through scaling and integration, which may allow large-scale deployment. However, current Micro-Electro-Mechanical-System gravimeters face challenges in achieving ultra-high sensitivity under fabrication tolerance and limited size. Here, we demonstrate a μGal-level Micro-Opto-Electro-Mechanical-System gravimeter by combining a freeform anti-spring design and an optical readout. A multi-stage algorithmic design approach is proposed to achieve high acceleration sensitivity without making high-aspect ratio springs. An optical grating-based readout is integrated, offering pm-level displacement sensitivity. Measurements reveal that the chip-scale sensing unit achieves a resonant frequency of 1.71 Hz and acceleration-displacement sensitivity of over 95 μm/Gal with an etching aspect ratio of smaller than 400:30. The benchmark with a commercial gravimeter PET demonstrates a self-noise of 1.1 μGal Hz
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.