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ArticleMicrosystems & nanoengineering2025

A nonlinear stiffness softening mechanism for low-bias, high-sensitivity MEMS accelerometers with extended dynamic range.

Peyman Firoozy et al.PubMed ↗Full text ↗Publisher ↗

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A nonlinear stiffness softening mechanism for low-bias, high-sensitivity MEMS accelerometers with extended dynamic range. | OpenQuestion