ArticleMicromachines2022
AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application.
Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
What it found
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Who cites it
8 citing papers in PubMed.
- High speed biaxial piezoelectric MEMS micromirror with varifocal tunability.Microsystems & nanoengineering · 2026Article
- Compact, scan-pattern-switchable 2D piezoelectric MEMS mirror with 1D addressable scanning.Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems · 2026Article
- Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping.Microsystems & nanoengineering · 2025Review
- Hybrid Actuation MEMS Micromirror with Decoupled Piezoelectric Fast Axis and Electromagnetic Slow Axis for Crosstalk Suppression.Micromachines · 2025Article
- A Large-Scan-Range Electrothermal Micromirror Integrated with Thermal Convection-Based Position Sensors.Micromachines · 2024Article
- Water-Immersible MEMS Mirror with a Large Optical Aperture.Micromachines · 2024Article
- Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies.Micromachines · 2023Article
- A motion characteristics modeled angular position sensor by nonlinear transfer of differential capacitance for miniaturized scanning mirrors.Microsystems & nanoengineering · 2023Article
Corrections and comments
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Authors and funding
6 authors.
Funding
Abstract
This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a diameter of 1.5 mm possessed adjustable optical tilt angles of up to 22.6° @ 30 V, with a high resonance frequency of about 8.2 kHz, while the 3 mm mirror reached 48.5° @ 41 V. The mirror with the gimbaled structure exhibited an excellent field of view and good mechanical decoupling. Additionally, a significant improvement in mirror scanning performance was observed in a vacuum (4 Pa), proving that the optical field of view was magnified by more than a factor of 10.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.