ArticleMicromachines2022
AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application.
Yichen Liu et al.PubMed ↗Full text ↗Publisher ↗
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ArticleMicromachines2022
Yichen Liu et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.