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ArticleMicromachines2023

Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies.

Jeong-Yeon Hwang et al.PubMed ↗Full text ↗Publisher ↗

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4 papers cite it

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Full record →Abstract, authors, funding and every citing paper · PMID 37763952