ArticleMicromachines2021
A Piezoresistive Pressure Sensor with Optimized Positions and Thickness of Piezoresistors.
Article in Micromachines, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 15 papers.
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15 citing papers in PubMed.
- A High-Sensitivity MEMS Pressure Sensor with a Narrow Cross-Beam Membrane-Short Beam Structure.Micromachines · 2026Article
- Insights into the Mechanism by Which Vacancy Defects Influence the Electrical and Piezoresistive Properties of Graphene.Nanomaterials (Basel, Switzerland) · 2026Article
- Biosensors in dental, oral and craniofacial applications.Npj biosensing · 2026Review
- Design and Application of Uniaxially Sensitive Stress Sensor.Micromachines · 2025Article
- Design of MEMS Pressure Sensor Anti-Interference System Based on Filtering and PID Compensation.Sensors (Basel, Switzerland) · 2024Article
- Enhanced Sensitivity of a Resistive Pressure Sensor Based on a PEDOT:PSS Thin Film on PDMS with a Random-Height Micropyramid Structure.Micromachines · 2024Article
- Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review.Micromachines · 2023Review
- Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane.Micromachines · 2023Article
- A Single-Side Micromachined MPa-Scale High-Temperature Pressure Sensor.Micromachines · 2023Article
- Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments.Microsystems & nanoengineering · 2023Article
- An SOI-Structured Piezoresistive Differential Pressure Sensor with High Performance.Micromachines · 2022Article
- Soft Multifunctional Porous Sponge Sensor for Pressure and Strain Using Liquid Metal/Polydimethylsiloxane with Silver-Nanowire-Coated Composite.Micromachines · 2022Article
- Design Rules for a Wearable Micro-Fabricated Piezo-Resistive Pressure Sensor.Micromachines · 2022Article
- Design of a Novel Medical Acoustic Sensor Based on MEMS Bionic Fish Ear Structure.Micromachines · 2022Article
- Process method of SiFrontiers in chemistry · 2022Article
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Authors and funding
5 authors.
Funding
Abstract
In this paper, a piezoresistive pressure sensor based on silicon on insulator (SOI) was presented, which was composed of an SOI layer with sensing elements and a glass cap for a hermetic package. Different from its conventional counterparts, the position and thickness of the four piezoresistors was optimized based on numerical simulation, which suggests that two piezoresistors at the center while the other two at the edge of the pressure-sensitive diaphragm and a thickness of 2 μm can produce the maximum sensitivity and the minimum nonlinearity. Due to the use of silicon rather than metal for electrical connections, the piezoresistive pressure sensor was fabricated in a highly simplified process. From the experimental results, the fabricated piezoresistive pressure sensor demonstrated a high sensitivity of 37.79 mV·V
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