ArticleMicromachines2023
Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane.
Le Hao et al.PubMed ↗Full text ↗Publisher ↗
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ArticleMicromachines2023
Le Hao et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.