ArticleMicromachines2022
An SOI-Structured Piezoresistive Differential Pressure Sensor with High Performance.
Zebin Xu et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
6 papers cite it
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ArticleMicromachines2022
Zebin Xu et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.