ArticleSensors (Basel, Switzerland)2020
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.
Article in Sensors (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 13 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
13 citing papers in PubMed.
- Compact, scan-pattern-switchable 2D piezoelectric MEMS mirror with 1D addressable scanning.Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems · 2026Article
- Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping.Microsystems & nanoengineering · 2025Review
- Integrating Optics and Parametrically-Resonant Micro-Scanner Design for Large Working Distance Implantable Microscopy.IEEE/ASME transactions on mechatronics : a joint publication of the IEEE Industrial Electronics Society and the ASME Dynamic Systems and Control Division · 2025Article
- An electromagnetic indirect-driving scanning mirror for wide-field coaxial LiDAR applications.Sensors and actuators. A, Physical · 2024Article
- Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors.Micromachines · 2024Article
- MEMS Micromirror Actuation Techniques: A Comprehensive Review of Trends, Innovations, and Future Prospects.Micromachines · 2024Review
- Adaptive Internal Model Backstepping Control for a Class of Second-Order Electromagnetic Micromirror with Output Performance Constraints and Anomaly Control.Micromachines · 2024Article
- Water-Immersible MEMS Mirror with a Large Optical Aperture.Micromachines · 2024Article
- Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies.Micromachines · 2023Article
- Structural Design and Experimental Studies of Resonant Fiber Optic Scanner Driven by Co-Fired Multilayer Piezoelectric Ceramics.Micromachines · 2023Article
- Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors.Micromachines · 2022Article
- Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles.Sensors (Basel, Switzerland) · 2021Article
- 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.Sensors (Basel, Switzerland) · 2020Article
Corrections and comments
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Authors and funding
9 authors.
Funding
Abstract
A 2D scanning micromirror with piezoelectric thin film aluminum nitride (AlN), separately used as actuator and sensor material, is presented. For endoscopic applications, such as fluorescence microscopy, the devices have a mirror plate diameter of 0.7 mm with a 4 mm
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.