ArticleMicromachines2022
Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors.
Chris Stoeckel et al.PubMed ↗Full text ↗Publisher ↗
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ArticleMicromachines2022
Chris Stoeckel et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.