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ArticleSmall (Weinheim an der Bergstrasse, Germany)2026

Preventing Plasma-Induced Resist Hardening in Molybdenum Disulfide Transistors via Sacrificial Metal Mask Lithography.

Dahyeon Kim et al.PubMed ↗Full text ↗Publisher ↗

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Full record →Abstract, authors, funding and every citing paper · PMID 42576675