ArticleJournal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems2026

Fabrication of 128+128 Element Row-Column Addressed 2D CMUT Arrays on a Borosilicate Glass Substrate Using Anodic Bonding and Trench Isolation of the Sealing Location.

Nairit Das et al.PubMed ↗Full text ↗Publisher ↗

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