ReviewMicromachines2026
Heteroepitaxial 3C-SiC for MEMS Applications.
Angela Garofalo et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
1 paper cites it
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ReviewMicromachines2026
Angela Garofalo et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.