ArticleMicromachines2026
Design and Fabrication of a Dual-Axis MEMS Electrostatic Micromirror Based on a Planar Comb Drive.
Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
1 citing paper in PubMed.
- Lie Classification and Symmetry-Preserving Reduced-Order Modeling of Nonlinear Electrostatic MEMS.Micromachines · 2026Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
8 authors.
Funding
Abstract
This paper designs and fabricates an electrostatic-driven dual-axis MEMS micromirror capable of out-of-plane torsional motion about both the X and Y axes. Both torsional axes employ planar comb structures for their drive mechanisms, effectively reducing the fabrication complexity. By leveraging the structural asymmetry introduced during processing in conjunction with resonant operating modes, the inherent disadvantage of planar comb structures for torsional motion is overcome. This study explores the operating principle, structural design, performance simulation, fabrication process, and testing of the micromirror. It proposes an indirect simulation method suitable for planar comb drive structures, providing theoretical support for device fabrication. During fabrication, optimising the removal of isolation material through oxygen-silicon growth enhances the reliability of subsequent processes. Test results demonstrate that the fabricated MEMS micromirror achieves a 26°×22° field of view at a 35 V drive voltage, outputting Lissajous-type scanning patterns. This design aims to propose an indirect simulation method and optimise the process accordingly. Experimental test results show that the simulation method is relatively accurate, with minimal deviation from actual tests. Process optimization improves wafer cleanliness and reduces the time cost of the corresponding process.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.