ArticleMicromachines2026
Design and Fabrication of a Dual-Axis MEMS Electrostatic Micromirror Based on a Planar Comb Drive.
Mumu Li et al.PubMed ↗Full text ↗Publisher ↗
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ArticleMicromachines2026
Mumu Li et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.