Millimeter-Level MEMS Actuators Based on Multi-Folded Beams and Harmful Mode-Suppression Structures.

Module-level free-space optical interconnects require actuators to combine both large stroke and high stability. To address this core trade-off that plagues traditional folded-beam actuators, we have developed a millimeter-scale MEMS electromagnetic actuator integrating a Differential Motion Rejection (DMR) unit with a rigid frame. Its performance was systematically evaluated through magnetic-structural coupling modeling, finite element simulation, and experiments. The actuator achieved millimeter-scale stroke under sinusoidal drive, with a primary resonant frequency of approximately 31 Hz. The introduction of the DMR and frame proved highly effective: the out-of-plane displacement at resonance was reduced by about 97%, the static Z-direction stiffness increased by over 50 times, and the displacement crosstalk decreased to 0.265%. Optical testing yielded a stable deflection angle of approximately ±21°. These results demonstrate that this design successfully combines large stroke with high stability, significantly suppressing out-of-plane parasitic motion and crosstalk, making it suitable for module-level optical interconnect systems with stringent space and stability requirements.