ArticleMicromachines2026
Millimeter-Level MEMS Actuators Based on Multi-Folded Beams and Harmful Mode-Suppression Structures.
Hangyu Zhou et al.PubMed ↗Full text ↗Publisher ↗
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ArticleMicromachines2026
Hangyu Zhou et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.