Development of Vacuum-Chamber-Type Capacitive Micro-Pressure Sensors.

Lung-Jieh Yang, De-Yu Jiang, Wei-Chen Wang, Chandrashekhar Tasupalli, Horng-Yuan Shih, Yi-Jen Wang

Abstract read

In one paragraph

Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it

0cells of the map it votes in

1citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

Capacitive Sensors and Actuators by CMOS MEMS Foundry.Micromachines · 2026
Article

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

Lung-Jieh YangDepartment of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei City 251301, Taiwan.ORCID 0000-0002-0639-0973

De-Yu JiangDepartment of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei City 251301, Taiwan.

Wei-Chen WangDepartment of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei City 251301, Taiwan.

Chandrashekhar TasupalliDepartment of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei City 251301, Taiwan.ORCID 0000-0003-0273-9135

Horng-Yuan ShihDepartment of Electrical and Computer Engineering, Tamkang University, New Taipei City 251301, Taiwan.

Yi-Jen WangTaiwan Semiconductor Research Institute, National Institutes of Applied Research, Hsinchu 300091, Taiwan.

Funding

Taiwan's National Science and Technology Council 282(NSTC) 112-2221-E-032-043-MY2 and 114-2221-E-032-017

6 · The paper itself

Abstract

This study presents the development of a capacitive pressure sensor tailored for measuring the dynamic pressure of flow fields. The sensor is fabricated using the UMC 0.18 μm CMOS-MEMS process, incorporated with additional post-processing steps such as metal wet etching, supercritical CO

Indexed as

capacitive pressure sensorcomplementary metal oxide semiconductor (CMOS)vacuum chamber

Identifiers

PMID41302808

DOI10.3390/mi16111290

PMCPMC12654310

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.