ArticleMicromachines2026
Capacitive Sensors and Actuators by CMOS MEMS Foundry.
Lung-Jieh Yang et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
1 paper cites it
this papercites it
ArticleMicromachines2026
Lung-Jieh Yang et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.