Influence of Nonlinear Effects Induced by Mode Coupling on Vibration Trajectories of MEMS Micromirrors.

Abstract read

In one paragraph

Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it

0cells of the map it votes in

0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

3 authors.

Zhen ChenMinistry of Education Key Laboratory of Micro/Nano Systems for Aerospace, Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, School of Mechanical Engineering, Northwestern Polytechnical University, 127 Youyi West Road, Xi'an 710072, China.ORCID 0009-0007-2451-0274

Dayong QiaoMinistry of Education Key Laboratory of Micro/Nano Systems for Aerospace, Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, School of Mechanical Engineering, Northwestern Polytechnical University, 127 Youyi West Road, Xi'an 710072, China.ORCID 0000-0003-3392-8844

Anjie PengMinistry of Education Key Laboratory of Micro/Nano Systems for Aerospace, Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, School of Mechanical Engineering, Northwestern Polytechnical University, 127 Youyi West Road, Xi'an 710072, China.

Funding

National Natural Science Foundation of China U21B2035

6 · The paper itself

Abstract

Detection of the vibration trajectories of MEMS micromirrors is crucial for ensuring their application performance. This study investigates key factors influencing micromirror vibration trajectories. When actuated by a square-wave signal containing high-frequency components, micromirrors exhibit mode coupling vibrations. By incorporating a mode coupling mechanism, this paper establishes a comprehensive vibration trajectory model for micromirrors. Numerical simulations were performed to obtain trajectory solutions. Both the experimental and simulation results demonstrate that the mode coupling leads to deviations between the actual trajectory and the expected sinusoidal pattern. These deviations compromise the accuracy of trajectory prediction systems, which typically assume that the trajectory follows a sinusoidal pattern. To mitigate the deviations caused by mode coupling, this study proposes structural parameter optimization during the micromirror design process.

Indexed as

micromirrormode couplingvibration trajectory

Identifiers

PMID40572443

DOI10.3390/mi16060723

PMCPMC12194898

What OpenQuestion holds

Textmetadata

LicenceCC BY

Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.