ArticleMicromachines2025
Influence of Nonlinear Effects Induced by Mode Coupling on Vibration Trajectories of MEMS Micromirrors.
Zhen Chen et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
ArticleMicromachines2025
Zhen Chen et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.