ReviewMicromachines2025
Recent Design and Application Advances in Micro-Electro-Mechanical System (MEMS) Electromagnetic Actuators.
Review in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
8 citing papers in PubMed.
- Lie Classification and Symmetry-Preserving Reduced-Order Modeling of Nonlinear Electrostatic MEMS.Micromachines · 2026Article
- CMOS-MEMS Z-Axis Magnetic Field Sensor with an Additional Collector.Micromachines · 2026Article
- Design and Implementation of an Electromagnetic-Capacitive Coupling Mechanism-Based Material Young's Modulus Measurement System.Materials (Basel, Switzerland) · 2026Article
- Recent Advances in MEMS Actuators for Microfluidic Applications: Emerging Designs, Multiphysics Modeling, and Performance Optimization.Micromachines · 2026Review
- Millimeter-Level MEMS Actuators Based on Multi-Folded Beams and Harmful Mode-Suppression Structures.Micromachines · 2026Article
- Modeling and validation of anisotropic thin-film deposition on cylindrical substrates for predictable resistance control in MEMS fabrication.Discover mechanical engineering · 2026Article
- Modeling and Validation of Anisotropic Thin-Film Deposition on Cylindrical Substrates for Predictable Resistance Control in MEMS Fabrication.Research square · 2025Article
- Metasurface-assisted bioelectronics: bridging photonic innovation with biomedical implants.Light, science & applications · 2025Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
9 authors.
Funding
Abstract
Micro-electro-mechanical system (MEMS) electromagnetic actuators have rapidly evolved into critical components of various microscale applications, offering significant advantages including precision, controllability, high force density, and rapid responsiveness. Recent advancements in actuator design, fabrication methodologies, smart control integration, and emerging application domains have significantly broadened their capabilities and practical applications. This comprehensive review systematically analyzes the recent developments in MEMS electromagnetic actuators, highlighting core operating principles such as Lorentz force and magnetic attraction/repulsion mechanisms and examining state-of-the-art fabrication technologies, such as advanced microfabrication techniques, additive manufacturing, and innovative material applications. Additionally, we provide an in-depth discussion on recent enhancements in actuator performance through smart and adaptive integration strategies, focusing on improved reliability, accuracy, and dynamic responsiveness. Emerging application fields, particularly micro-optical systems, microrobotics, precision micromanipulation, and microfluidic components, are extensively explored, demonstrating how recent innovations have significantly impacted these sectors. Finally, critical challenges, including miniaturization constraints, integration complexities, power efficiency, and reliability issues, are identified, alongside a prospective outlook outlining promising future research directions. This review aims to serve as an authoritative resource, fostering further innovation and technological advancement in MEMS actuators and related interdisciplinary fields.
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.