ArticleNanomaterials (Basel, Switzerland)2025

The Chemical Deformation of a Thermally Cured Polyimide Film Surface into Neutral 1,2,4,5-Benzentetracarbonyliron and 4,4'-Oxydianiline to Remarkably Enhance the Chemical-Mechanical Planarization Polishing Rate.

Man-Hyup Han et al.PubMed ↗Full text ↗Publisher ↗

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