ArticleMicrosystems & nanoengineering2025
A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity.
Article in Microsystems & nanoengineering, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
4 citing papers in PubMed.
- A chip-level MEMS short-period seismometer for distributed planetary seismic networks.Microsystems & nanoengineering · 2026Article
- Quality Assessment of a Foot-Mounted Inertial Measurement Unit System to Measure On-Field Spatiotemporal Acceleration Metrics.Sensors (Basel, Switzerland) · 2025Article
- A nonlinear stiffness softening mechanism for low-bias, high-sensitivity MEMS accelerometers with extended dynamic range.Microsystems & nanoengineering · 2025Article
- On the Mode Localization Between Two Unidentical Resonators with Different Bending Modes for Acceleration Sensing.Sensors (Basel, Switzerland) · 2025Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
7 authors.
Funding
Abstract
Anti-spring mechanisms are widely used for improving the noise performance of MEMS accelerometers due to their stiffness softening effect. However, the existing mechanisms typically require large bias force and displacement for achieving stiffness softening, leading to large device dimensions. Here, we propose a novel anti-spring mechanism composed of two pre-shaped curved beams connected in a parallel configuration, which can achieve stiffness softening without requiring large bias force and displacement. The stiffness softening effect of the mechanism is verified through theoretical modeling and finite element method (FEM) simulation. After that, the mechanism is implemented in a 4.2 mm × 4.9 mm MEMS capacitive accelerometer prototype. The experimental results reveal that the sensitivity of the accelerometer increases by 10.4% compared to the initial sensitivity; at the same time, the noise floor and bias instability decrease by 10.5% and 4.2%. The sensitivity, nonlinearity, bias instability, and noise floor after biasing are 51.1 mV/g, 0.99%, 0.24 mg, and 21.3
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.