A Micromachined Silicon-on-Glass Accelerometer with an Optimized Comb Finger Gap Arrangement.

Jiacheng Li, Rui Feng, Xiaoyi Wang, Huiliang Cao, Keru Gong, Huikai Xie

Abstract read

In one paragraph

Article in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

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0cells of the map it votes in

1citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

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3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

Design and Implementation of a Low-Noise Analog Front-End Circuit for MEMS Capacitive Accelerometers.Micromachines · 2026
Article

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5 · Who and what money

Authors and funding

6 authors.

Jiacheng LiSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.

Rui FengEast China Institute of Photo-Electron lC, Bengbu 233030, China.

Xiaoyi WangSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.

Huiliang CaoChongqing Institute of Microelectronics and Microsystems, Beijing Institute of Technology, Chongqing 400000, China.ORCID 0000-0001-9862-4329

Keru GongSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.

Huikai XieSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.ORCID 0000-0002-8393-0021

Funding

National Natural Science Foundation of China 52475586National Natural Science Foundation of China ，National Science and Technology Planning Project, grant number 6231101499 ， 2023YFB3507300.

6 · The paper itself

Abstract

This paper reports the design, fabrication, and characterization of a MEMS capacitive accelerometer with an asymmetrical comb finger arrangement. By optimizing the ratio of the gaps of a rotor finger to its two adjacent stator fingers, the sensitivity of the accelerometer is maximized for the same comb finger area. With the fingers' length, width, and depth at 120 μm, 4 μm, and 45 μm, respectively, the optimized finger gap ratio is 2.5. The area of the proof mass is 750 μm × 560 μm, which leads to a theoretical thermomechanical noise of 9 μg/√Hz. The accelerometer has been fabricated using a modified silicon-on-glass (SOG) process, in which a groove is pre-etched into the glass to hold the metal electrode. This SOG process greatly improves the silicon-to-glass bonding yield. The measurement results show that the resonant frequency of the accelerometer is about 2.05 kHz, the noise floor is 28 μg/√Hz, and the nonlinearity is less than 0.5%.

Indexed as

accelerometercomb finger designMEMSSOG

Identifiers

PMID39337833

DOI10.3390/mi15091173

PMCPMC11434136

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.