ArticleMicromachines2024
A Micromachined Silicon-on-Glass Accelerometer with an Optimized Comb Finger Gap Arrangement.
Jiacheng Li et al.PubMed ↗Full text ↗Publisher ↗
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ArticleMicromachines2024
Jiacheng Li et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.