Evidence map›Paper›PMID 39203662›Full record

ReviewMicromachines2024

Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review.

Chenguang Xin, Yingkun Xu, Zhongyao Zhang, Mengwei Li

Abstract readReview
In one paragraph

Review in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.

0numbers the graph read from it
0cells of the map it votes in
3citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

3 citing papers in PubMed.

  1. Article
  2. Article
  3. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

4 authors.

Chenguang XinSchool of Instrument and Electronics, North University of China, Taiyuan 030051, China.ORCID 0000-0001-9489-4452
Yingkun XuSchool of Instrument and Electronics, North University of China, Taiyuan 030051, China.
Zhongyao ZhangSchool of Instrument and Electronics, North University of China, Taiyuan 030051, China.
Mengwei LiSchool of Instrument and Electronics, North University of China, Taiyuan 030051, China.

Funding

China Postdoctoral Science Foundation 2024M752996National Natural Science Foundation of China 62375247
6 · The paper itself

Abstract

High-precision displacement sensing has been widely used across both scientific research and industrial applications. The recent interests in developing micro-opto-electro-mechanical systems (MOEMS) have given rise to an excellent platform for miniaturized displacement sensors. Advancement in this field during past years is now yielding integrated high-precision sensors which show great potential in applications ranging from photoacoustic spectroscopy to high-precision positioning and automation. In this review, we briefly summarize different techniques for high-precision displacement sensing based on MOEMS and discuss the challenges for future improvement.

Indexed as

displacementMOEMSoptical sensing

Identifiers

PMID39203662
PMCPMC11356231

What OpenQuestion holds

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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.