ReviewMicromachines2024
Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review.
Chenguang Xin et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
3 papers cite it
this papercites it
ReviewMicromachines2024
Chenguang Xin et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.