ArticleMicromachines2023
Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies.
Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
4 citing papers in PubMed.
- Frequency-angle decoupling design for grid-etched piezoelectric MEMS cantilevers and its application to quasi-static micromirrors.Microsystems & nanoengineering · 2026Article
- Compact, scan-pattern-switchable 2D piezoelectric MEMS mirror with 1D addressable scanning.Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems · 2026Article
- High-Precision Optical Angle Detection Method for Two-Dimensional MEMS Mirrors.Micromachines · 2025Article
- Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping.Microsystems & nanoengineering · 2025Review
Corrections and comments
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Authors and funding
7 authors.
Funding
Abstract
In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and resonant scan modes. Particularly, this paper deals with various achievable scan patterns including 1D line scan and 2D area scan capabilities and driving methods to realize each scanning strategy. Bidirectional quasi-static actuation along horizontal, vertical, and diagonal scanning directions was experimentally characterized and even under a low voltage level of ±20 V, a total optical scan angle of 10.4° was achieved. In addition, 1D line scanning methods using both resonant and non-resonant frequencies were included and a total optical scan angle of 14° was obtained with 100 mV
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Registered trials
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