ArticleMicromachines2023
Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane.
Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed.
- Development of Piezoresistive Micropressure Sensor Based on Grooved Diaphragm with Back Peninsulas and Trenches.Micromachines · 2026Article
- Advances in silicon carbide pressure sensors for high-temperature extreme environment sensing.Microsystems & nanoengineering · 2026Review
- Development of leadless packaged heavily doped N-type 4H-SiC pressure sensor family for harsh environments.Microsystems & nanoengineering · 2025Article
- MEMS Pressure Sensors with Novel TSV Design for Extreme Temperature Environments.Sensors (Basel, Switzerland) · 2025Article
- Development and in-vitro validation of an intraoral wearable biofeedback system for bruxism management.Frontiers in bioengineering and biotechnology · 2025Article
- High-Precision Ultra-Long Air Slit Fabrication Based on MEMS Technology for Imaging Spectrometers.Micromachines · 2023Article
- A Study on the Biofilm Removal Efficacy of a Bioelectric Toothbrush.Bioengineering (Basel, Switzerland) · 2023Article
- Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review.Micromachines · 2023Review
Corrections and comments
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Authors and funding
6 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
This paper presents a SOI piezoresistive pressure sensor with the crossbeam membrane. The roots of the crossbeam were widened, which solved the problem of the poor dynamic performance of small-range pressure sensors working at a high temperature of 200 °C. A theoretical model was established to optimize the proposed structure, which combined the finite element and the curve fitting. Using the theoretical model, the structural dimensions were optimized to obtain the optimal sensitivity. During optimization, the sensor nonlinearity was also taken into consideration. The sensor chip was fabricated by MEMS bulk-micromachining technology, and Ti/Pt/Au metal leads were prepared to improve the sensor ability of high-temperature resistance over a long time. The sensor chip was packaged and tested, and the experimental results show the sensor achieved an accuracy of 0.241% FS, nonlinearity of 0.180% FS, hysteresis of 0.086% FS and repeatability of 0.137% FS at the high temperature. Given the good reliability and performance at the high temperature, the proposed sensor provides a suitable alternative for the measurement of pressure at high temperatures.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.