ArticleMicromachines2023
Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR.
L Mollard et al.PubMed ↗Full text ↗Publisher ↗
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ArticleMicromachines2023
L Mollard et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.