Evidence map›Paper›PMID 37112146›Full record

ArticleSensors (Basel, Switzerland)2023

A GHz Silicon-Based Width Extensional Mode MEMS Resonator with

Wenli Liu, Yujie Lu, Zeji Chen, Qianqian Jia, Junyuan Zhao, Bo Niu, Wei Wang, Yalu Hao, Yinfang Zhu, Jinling Yang and 1 more

Abstract read
In one paragraph

Article in Sensors (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.

0numbers the graph read from it
0cells of the map it votes in
3citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

3 citing papers in PubMed.

  1. Article
  2. Article
  3. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

11 authors.

Wenli LiuInstitute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Yujie LuInstitute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.ORCID 0000-0002-4691-0304
Zeji ChenInstitute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Qianqian JiaInstitute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.ORCID 0000-0003-2126-7954
Junyuan ZhaoInstitute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Bo NiuInstitute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Wei WangInstitute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Yalu HaoInstitute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Yinfang ZhuInstitute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Jinling YangInstitute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Fuhua YangInstitute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.

Funding

National Key Research and Development Program of China 2022YFF0706102National Natural Science Foundation of China 61734007National Natural Science Foundation of China 62234012
6 · The paper itself

Abstract

This work presents a silicon-based capacitively transduced width extensional mode (WEM) MEMS rectangular plate resonator with quality factor (

Indexed as

GHz frequencyMEMS resonatorquality factorwidth extensional mode

Identifiers

PMID37112146
PMCPMC10143676

What OpenQuestion holds

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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.