ArticleSensors (Basel, Switzerland)2023
A GHz Silicon-Based Width Extensional Mode MEMS Resonator with
Wenli Liu et al.PubMed ↗Full text ↗Publisher ↗
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ArticleSensors (Basel, Switzerland)2023
Wenli Liu et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.