ArticleMicrosystems & nanoengineering2023
Integrated silicon photonic MEMS.
Article in Microsystems & nanoengineering, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. An erratum has been issued. Cited by 24 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
24 citing papers in PubMed.
- Bridging polarization generation and analysis on a photonic chip.Light, science & applications · 2026Article
- Review of Optical Fiber and Integrated Photonic Sensors for Industry and Smart Manufacturing: Technologies, Applications, Structural Health Monitoring and AI-Enabled Sensing.Sensors (Basel, Switzerland) · 2026Review
- High-speed non-volatile barium titanate field-programmable photonic gate array.Nature photonics · 2026Article
- Frequency-Mode Study of Piezoelectric Devices for Non-Invasive Optical Activation.Nanomaterials (Basel, Switzerland) · 2025Article
- Angled electrode comb drives for enhanced actuator in silicon photonic applications.Microsystems & nanoengineering · 2025Article
- Nonvolatile silicon photonic MEMS switches enabled by van der Waals force.Science advances · 2025Article
- Robust and Compact Electrostatic Comb Drive Arrays for High-Performance Monolithic Silicon Photonics.Micromachines · 2025Article
- Investigation of the Thermal Conductance of MEMS Contact Switches.Micromachines · 2025Article
- On-Chip Active Supercoupled Topological Cavity.Advanced materials (Deerfield Beach, Fla.) · 2025Article
- Levitation and controlled MHz rotation of a nanofabricated rod by a high-NA metalens.Microsystems & nanoengineering · 2025Article
- Ultra-low-crosstalk silicon switches driven thermally and electrically.Microsystems & nanoengineering · 2025Article
- Inverse Design of Unitary Transmission Matrices in Silicon Photonic Coupled Waveguide Arrays Using a Neural Adjoint Model.ACS photonics · 2025Article
- A MEMS grating modulator with a tunable sinusoidal grating for large-scale extendable apertures.Microsystems & nanoengineering · 2025Article
- Using light to image millimeter wave based on stacked meta-MEMS chip.Light, science & applications · 2025Article
- Silicon photonic MEMS switches based on split waveguide crossings.Nature communications · 2025Article
- Denoising-autoencoder-facilitated MEMS computational spectrometer with enhanced resolution on a silicon photonic chip.Nature communications · 2024Article
- Acoustic Modulation of Individual Nanowire Quantum Dots Integrated into a Hybrid Thin-Film Lithium Niobate Photonic Platform.Nano letters · 2024Article
- Polarization Independent Dynamic Beam Steering based on Liquid Crystal Integrated Metasurface.Scientific reports · 2024Article
- Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator.Sensors (Basel, Switzerland) · 2024Article
- A 2 μm Wavelength Band Low-Loss Spot Size Converter Based on Trident Structure on the SOI Platform.Micromachines · 2024Article
Corrections and comments
- Erratum issued
Authors and funding
18 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Silicon photonics has emerged as a mature technology that is expected to play a key role in critical emerging applications, including very high data rate optical communications, distance sensing for autonomous vehicles, photonic-accelerated computing, and quantum information processing. The success of silicon photonics has been enabled by the unique combination of performance, high yield, and high-volume capacity that can only be achieved by standardizing manufacturing technology. Today, standardized silicon photonics technology platforms implemented by foundries provide access to optimized library components, including low-loss optical routing, fast modulation, continuous tuning, high-speed germanium photodiodes, and high-efficiency optical and electrical interfaces. However, silicon's relatively weak electro-optic effects result in modulators with a significant footprint and thermo-optic tuning devices that require high power consumption, which are substantial impediments for very large-scale integration in silicon photonics. Microelectromechanical systems (MEMS) technology can enhance silicon photonics with building blocks that are compact, low-loss, broadband, fast and require very low power consumption. Here, we introduce a silicon photonic MEMS platform consisting of high-performance nano-opto-electromechanical devices fully integrated alongside standard silicon photonics foundry components, with wafer-level sealing for long-term reliability, flip-chip bonding to redistribution interposers, and fibre-array attachment for high port count optical and electrical interfacing. Our experimental demonstration of fundamental silicon photonic MEMS circuit elements, including power couplers, phase shifters and wavelength-division multiplexing devices using standardized technology lifts previous impediments to enable scaling to very large photonic integrated circuits for applications in telecommunications, neuromorphic computing, sensing, programmable photonics, and quantum computing.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.