ArticleMicrosystems & nanoengineering2023
Integrated silicon photonic MEMS.
Niels Quack et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
24 papers cite it
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ArticleMicrosystems & nanoengineering2023
Niels Quack et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.