ReviewMicromachines2022
Concepts and Key Technologies of Microelectromechanical Systems Resonators.
Review in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
6 citing papers in PubMed.
- Impact of Surface Effects on Support-Loss Mechanisms in Micro-/Nano-Beam Resonators.Nanomaterials (Basel, Switzerland) · 2026Article
- Dispersive coupling and dual-mode sensing of a micromechanical resonator.Microsystems & nanoengineering · 2026Article
- Characterization of Ultrasonic Cavitation Energy for Efficient Soil Pretreatment: A Novel Approach for Rapid Detection of Available Potassium and Phosphorus Using CE-C4D.Current organic synthesis · 2026Article
- Interface Material Modification to Enhance the Performance of a Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS Resonator by Localized Annealing Through Joule Heating.Micromachines · 2025Article
- Low Phase Noise, Dual-Frequency Pierce MEMS Oscillators with Direct Print Additively Manufactured Amplifier Circuits.Micromachines · 2025Article
- A GHz Silicon-Based Width Extensional Mode MEMS Resonator withSensors (Basel, Switzerland) · 2023Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
5 authors.
Funding
Abstract
In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications.
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.