ArticleScientific reports2022
Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides.
Article in Scientific reports, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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Who cites it
3 citing papers in PubMed.
- An integrated monolithic photonic accelerometer with on-chip fringe-counting.Microsystems & nanoengineering · 2026Article
- Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review.Micromachines · 2024Review
- The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer.Sensors (Basel, Switzerland) · 2024Article
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Authors and funding
5 authors.
Funding
Abstract
In this paper, a novel optical MEMS accelerometer is proposed based on evanescent coupling between parallel silicon nanowaveguides. The coupling length between nanowaveguides changes due to the input acceleration, leading to a great change of coupling efficiency. As a result, the applied acceleration can be obtained by measuring the transmission of waveguiding light. Simulation results with optical displacement sensing sensitivity of 32.83%/[Formula: see text]m within measurement range of 1.68 g is obtained. This design shows high compactness with no need of assembly, suggesting great potential in applications such as integrated photonic circuits.
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Registered trials
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