ArticleMicromachines2022
A Novel Packaged Ultra-High Q Silicon MEMS Butterfly Vibratory Gyroscope.
Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
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Who cites it
5 citing papers in PubMed.
- Multi-Damping Mechanism Analysis and Quality Factor Optimization of Micromachined Disk Resonator Gyroscopes.Micromachines · 2026Article
- A review of glass thermal reflow: method, device, and applications.Microsystems & nanoengineering · 2026Review
- Reliability of MEMS inertial devices in mechanical and thermal environments: A review.Heliyon · 2024Review
- Research on Packaging Reliability and Quality Factor Degradation Model for Wafer-Level Vacuum Sealing MEMS Gyroscopes.Micromachines · 2023Article
- Effects of Mask Material on Lateral Undercut of Silicon Dry Etching.Micromachines · 2023Article
Corrections and comments
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Authors and funding
7 authors.
Funding
Abstract
A novel three-dimensional (3D) wafer-level sandwich packaging technology is here applied in the dual mass MEMS butterfly vibratory gyroscope (BFVG) to achieve ultra-high Q factor. A GIS (glass in silicon) composite substrate with glass as the main body and low-resistance silicon column as the vertical lead is processed by glass reflow technology, which effectively avoids air leakage caused by thermal stress mismatch. Sputter getter material is used on the glass cap to further improve the vacuum degree. The Silicon-On-Insulator (SOI) gyroscope structure is sandwiched between the composite substrate and glass cap to realize vertical electrical interconnection by high-vacuum anodic bonding. The Q factors of drive and sense modes in BFVG measured by the self-developed double closed-loop circuit system are significantly improved to 8.628 times and 2.779 times higher than those of the traditional ceramic shell package. The experimental results of the processed gyroscope also demonstrate a high resolution of 0.1°/s, the scale factor of 1.302 mV/(°/s), and nonlinearity of 558 ppm in the full-scale range of ±1800°/s. By calculating the Allen variance, we obtained the angular random walk (ARW) of 1.281°/√h and low bias instability (BI) of 9.789°/h. The process error makes the actual drive and sense frequency of the gyroscope deviate by 8.989% and 5.367% compared with the simulation.
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Registered trials
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