ArticleMicromachines2022
A Novel Packaged Ultra-High Q Silicon MEMS Butterfly Vibratory Gyroscope.
Lu Jia et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
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ArticleMicromachines2022
Lu Jia et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.