Evidence map›Paper›PMID 36364666›Full record

ArticleNanomaterials (Basel, Switzerland)2022

Crystallinity Effect on Electrical Properties of PEALD-HfO

Xiao-Ying Zhang, Jing Han, Duan-Chen Peng, Yu-Jiao Ruan, Wan-Yu Wu, Dong-Sing Wuu, Chien-Jung Huang, Shui-Yang Lien, Wen-Zhang Zhu

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Nanomaterials (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.

0numbers the graph read from it
0cells of the map it votes in
4citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

4 citing papers in PubMed.

  1. Article
  2. Article
  3. Relation Between Thickness and TFTs Properties of HfONanomaterials (Basel, Switzerland) · 2025
    Article
  4. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

9 authors.

Xiao-Ying ZhangXiamen Key Laboratory of Development and Application for Advanced Semiconductor Coating Technology, School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
Jing HanXiamen Key Laboratory of Development and Application for Advanced Semiconductor Coating Technology, School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
Duan-Chen PengXiamen Key Laboratory of Development and Application for Advanced Semiconductor Coating Technology, School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
Yu-Jiao RuanNational Measurement and Testing Center for Flat Panel Display Industry, Xiamen Institute of Measurement and Testing, Xiamen 361024, China.
Wan-Yu WuDepartment of Materials Science and Engineering, National United University, Miaoli 36063, Taiwan.
Dong-Sing WuuDepartment of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Nantou 54561, Taiwan.ORCID 0000-0002-0314-8743
Chien-Jung HuangDepartment of Applied Physics, National University of Kaohsiung, Kaohsiung University Rd., Kaohsiung 81148, Taiwan.
Shui-Yang LienXiamen Key Laboratory of Development and Application for Advanced Semiconductor Coating Technology, School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.
Wen-Zhang ZhuXiamen Key Laboratory of Development and Application for Advanced Semiconductor Coating Technology, School of Opto-Electronic and Communication Engineering, Xiamen University of Technology, Xiamen 361024, China.

Funding

Graduate Science and Technology Innovation Program YKJCX2021102 and YKJCX2021106Natural Science Foundation of Fujian Province 2020H0025 and 2020J01298Science and Technology Project of Xiamen 3502ZCQ20191002Science and Technology Projects of Fujian Administration for Market Regulation FJMS2020044Xiamen Scientific Research Start-up Foundation for the Returned Overseas Chinese Scholars 5010320004
6 · The paper itself

Abstract

Hafnium oxide (HfO

Indexed as

crystalline behaviorelectrical propertiesHfO2 filmssubstrate temperature

Identifiers

PMID36364666
PMCPMC9656191

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.