ArticleNanomaterials (Basel, Switzerland)2022
Crystallinity Effect on Electrical Properties of PEALD-HfO
Xiao-Ying Zhang et al.PubMed ↗Full text ↗Publisher ↗
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4 papers cite it
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ArticleNanomaterials (Basel, Switzerland)2022
Xiao-Ying Zhang et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.