Evidence map›Paper›PMID 35888959›Full record

ArticleMicromachines2022

Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor.

Rui Gao, Wenjun Zhang, Junmin Jing, Zhiwei Liao, Zhou Zhao, Bin Yao, Huiyu Zhang, Yuzhen Guo, Yanbo Xu, Yonghua Wang and 3 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Article
  2. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

13 authors.

Rui GaoState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.ORCID 0000-0002-5386-8765
Wenjun ZhangSchool of Aerospace Engineering, Xiamen University, Xiamen 361102, China.
Junmin JingState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Zhiwei LiaoState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Zhou ZhaoState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Bin YaoState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Huiyu ZhangState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Yuzhen GuoState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Yanbo XuState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Yonghua WangState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Zengxing ZhangSchool of Aerospace Engineering, Xiamen University, Xiamen 361102, China.
Zhidong ZhangState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.ORCID 0000-0002-6464-4003
Chenyang XueState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

Funding

Applied basic research project of Shanxi Province 20210302124539National Natural Science Foundation of China No. 62101511, 61727806Tan Kah Kee Innovation Laboratory RD2022020511
6 · The paper itself

Abstract

Microelectromechanical system (MEMS) pressure sensors have a wide range of applications based on the advantages of mature technology and easy integration. Among them, piezoresistive sensors have attracted great attention with the advantage of simple back-end processing circuits. However, less research has been reported on the performance of piezoresistive pressure sensors in dynamic environments, especially considering the vibrations and shocks frequently encountered during the application of the sensors. To address these issues, this paper proposes a design method for a MEMS piezoresistive pressure sensor, and the fabricated sensor is evaluated in a series of systematic dynamic environmental adaptability tests. After testing, the output sensitivity of the sensor chip was 9.21 mV∙bar

Indexed as

dynamic environment testpiezoresistive pressure sensorsilicon-on-insulator (SOI) structure

Identifiers

PMID35888959
PMCPMC9321605

What OpenQuestion holds

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.