ArticleMicromachines2022
Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates.
Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
8 citing papers in PubMed, 34 citations in OpenAlex.
- High-Sensitivity Solidly Mounted Resonator Load Sensor Based on AlN/AlScN Heterostructure.Sensors (Basel, Switzerland) · 2025Article
- Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping.Microsystems & nanoengineering · 2025Review
- Unveiling the Pockels coefficient of ferroelectric nitride ScAlN.Nature communications · 2024Article
- CMOS-compatible, AlScN-based integrated electro-optic phase shifter.Nanophotonics (Berlin, Germany) · 2024Article
- Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios.Nature communications · 2024Article
- Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies.Micromachines · 2023Article
- Editorial for Special Issue "Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices".Micromachines · 2023Article
- Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible Keff2.Micromachines · 2022Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
11 authors at 3 institutions in 1 country.
Funding
Abstract
In this work, we present a method for growing highly
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.