ArticleMaterials (Basel, Switzerland)2022
Mechanical and Tribological Properties of Ta-N and Ta-Al-N Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering.
Article in Materials (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
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6 citing papers in PubMed.
- Bandgap engineering of tantalum nitride thin films by ion‑assisted magnetron sputtering for advanced electronic and radiation detection applications.Journal of materials science. Materials in electronics · 2026Article
- The Influence of the Annealing Process on the Mechanical Properties of Chromium Nitride Thin Films.Materials (Basel, Switzerland) · 2025Article
- Substrate Bias-Driven Structural and Mechanical Evolution of AlCrN and AlCrSiN Coatings via Reactive Magnetron Sputtering.Materials (Basel, Switzerland) · 2025Article
- XPS Investigation of the Oxidation States of the As-Deposited Ta Films Prepared by Magnetron Sputtering Technology.Materials (Basel, Switzerland) · 2023Article
- Mechanical Properties and Oxidation Behavior of TaWSiN Films.Materials (Basel, Switzerland) · 2022Article
- Microstructure, Mechanical and Tribological Properties of Arc Ion Plating NbN-Based Nanocomposite Films.Nanomaterials (Basel, Switzerland) · 2022Article
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7 authors.
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Abstract
In this article, the depositions and functional characterizations of Ta-N and Ta-Al-N coatings for protection purposes, grown by reactive high-power impulse magnetron sputtering onto silicon substrates, are described. Nitride films were grown while changing the substrate polarization voltage (i.e., the applied bias voltage) during the process. Moreover, the effects of adding Al to form a ternary system and the resulting variation of the coatings' mechanical and tribological properties have been widely investigated by nanoindentation, scratch, and wear tests. Micro-Raman characterization has been applied to the wear tracks to explore the comprehensive tribo-environment and wear mechanism. Interestingly, Ta-Al-N films, despite significantly improved mechanical properties, show a premature failure with respect to Ta-N coatings. The wear mechanisms of Ta-N and Ta-Al-N systems were revealed to be very different. Indeed, Ta-Al-N films suffer higher oxidation phenomena during wear, with the formation of an oxidized surface tribofilm and a reduced wear resistance, while Ta-N coatings undergo plastic deformation at the wear surface, with a slightly adhesive effect.
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