ArticleMicrosystems & nanoengineering2020
Design rules for dense and rapid Lissajous scanning.
Article in Microsystems & nanoengineering, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 11 papers.
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Who cites it
11 citing papers in PubMed.
- High speed biaxial piezoelectric MEMS micromirror with varifocal tunability.Microsystems & nanoengineering · 2026Article
- Hybrid Actuation MEMS Micromirror with Decoupled Piezoelectric Fast Axis and Electromagnetic Slow Axis for Crosstalk Suppression.Micromachines · 2025Article
- Ultrafast laser bone ablation towards high surgical speeds and clinically relevant operation times for spine surgeries.Biomedical optics express · 2025Article
- A comprehensive analysis of the impacts of Image Resolution and Scanning Times on the quality of MPI-reconstructed images.Scientific reports · 2025Article
- Vision Gaze-Driven Micro-Electro-Mechanical Systems Light Detection and Ranging Optimization.Research (Washington, D.C.) · 2025Article
- Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies.Micromachines · 2023Article
- Piezoelectric MEMS Mirror with Lissajous Scanning for Automobile Adaptive Laser Headlights.Micromachines · 2022Article
- Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System.Micromachines · 2022Article
- Improved sampling scheme for LiDAR in Lissajous scanning mode.Microsystems & nanoengineering · 2022Review
- Resonant scanning design and control for fast spatial sampling.Scientific reports · 2021Article
- Nanophotonics for light detection and ranging technology.Nature nanotechnology · 2021Review
Corrections and comments
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Authors and funding
3 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Lissajous microscanners are very popular in compact laser-scanning applications, such as solid-state light detection and ranging (LIDAR), owing to their high-quality factor and low power consumption. In the Lissajous scanner driven by a two-axis micro-electro-mechanical system scanning mirror (MEMS-SM), the design theory is insufficient to meet the temporal and spatial resolution at the same time. In this paper, the greatest common divisor of the two-axis driving frequency is used as the temporal resolution, the concept of the fill factor (FF) is used to describe the spatial resolution of the scanner, and a general algorithm for calculating the FF is presented. Combined with the characteristics of the Lissajous trajectory, three design rules of the general Lissajous scanner are proposed, and the design theory of the Lissajous scanner enabling MEMS LIDAR is perfected. Experimental results show that the proposed design rules can effectively meet the LIDAR design requirements.
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