ArticleNature communications2020
Near-field sub-diffraction photolithography with an elastomeric photomask.
Article in Nature communications, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 23 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
23 citing papers in PubMed.
- Enabling Scalable Nanoscale 3D Printing via Laser-Driven Termination.Small (Weinheim an der Bergstrasse, Germany) · 2026Article
- Cooperative Solvent-Thermal Interactions Enable Multi-Material Nanotransfer Printing for Multi-Dimensional Molecular Profiling.Small (Weinheim an der Bergstrasse, Germany) · 2026Article
- Lithographic patterning of conformal thin films on 3D structures using Scaffold-architected Lift-off masks.Nature communications · 2026Article
- Flexible Capacitive Pressure Sensors with Ultrasonically Engineered Cu-Filled PDMS Dielectric Layers.Sensors (Basel, Switzerland) · 2026Article
- Vertically Aligned Nanopillar Electrodes: Engineered Interfaces for Electrophysiology and Cell-Electrode Coupling.Small methods · 2026Review
- Rapid and High-Fidelity Fabrication of Embedded Elastomeric Photomask for Wafer-Scale Sub-Micrometer Conformal Contact Photolithography.Micromachines · 2026Article
- Novel low-cost periodic and flexible SERS substrate fabrication via soft lithography and glancing angle deposition technique.Mikrochimica acta · 2026Article
- AI-Integrated Micro/Nanorobots for Biomedical Applications: Recent Advances in Design, Fabrication, and Functions.Biosensors · 2025Review
- A 3D Printing Strategy for Hard Curved Surfaced Circuits: From Materials to Applications.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Review
- Nanotheranostics: The Fabrication of Theranostics with Nanoparticles and their Application to Treat the Neurological Disorders.Recent patents on nanotechnology · 2025Review
- Controlled Formation of Porous Cross-Bar Arrays Using Nano-Transfer Printing.Materials (Basel, Switzerland) · 2024Article
- Metasurface-Embedded Contact Lenses for Holographic Light Projection.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- Printable, stretchable metal-vapor-desorption layers for high-fidelity patterning in soft, freeform electronics.Nature communications · 2024Article
- Advances in lithographic techniques for precision nanostructure fabrication in biomedical applications.Discover nano · 2023Review
- Direct Printing of Ultrathin Block Copolymer Film with Nano-in-Micro Pattern Structures.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2023Article
- Tailoring Two-Dimensional Matter Using Strong Light-Matter Interactions.Nano letters · 2023Article
- Transparent and Multi-Foldable Nanocellulose Paper Microsupercapacitors.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2022Article
- Photonic crystal L3 cavity laser fabricated using maskless digital photolithography.Nanophotonics (Berlin, Germany) · 2022Article
- Binary-state scanning probe microscopy for parallel imaging.Nature communications · 2022Article
- Flexible and Stretchable Bioelectronics.Materials (Basel, Switzerland) · 2022Review
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
25 authors.
Funding
Abstract
Photolithography is the prevalent microfabrication technology. It needs to meet resolution and yield demands at a cost that makes it economically viable. However, conventional far-field photolithography has reached the diffraction limit, which imposes complex optics and short-wavelength beam source to achieve high resolution at the expense of cost efficiency. Here, we present a cost-effective near-field optical printing approach that uses metal patterns embedded in a flexible elastomer photomask with mechanical robustness. This technique generates sub-diffraction patterns that are smaller than 1/10
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.