ArticleMicromachines2018
SF₆ Optimized O₂ Plasma Etching of Parylene C.
Lingqian Zhang et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
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ArticleMicromachines2018
Lingqian Zhang et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.