ArticleACS omega2026
Systematic Optimization of Sputtered AZO Thin Films and Their Integration as Alternative Transparent Electrodes for Perovskite Solar Cells.
Article in ACS omega, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
Transparent conducting oxides (TCOs) are critical components of perovskite solar cells (PSCs), motivating the search for low-cost and scalable alternatives to conventional fluorine-doped tin oxide (FTO). Among the proposed alternatives, Al-doped ZnO (AZO) has been widely investigated as a low-cost, indium-free transparent conductive oxide. However, systematic studies correlating sputtering parameters with AZO thin film properties and PSC performance through direct benchmarking against commercial FTO under identical device fabrication conditions remain limited. In this study, AZO thin films were systematically optimized by magnetron sputtering through controlled variation of sputtering power, annealing conditions, substrate temperature, and deposition duration. The optimized high-temperature-grown AZO film (AZO-13) exhibited high visible transparency (∼86%), low sheet resistance (1.26 × 10
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