ArticleJournal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society2026
Process Optimization and Characterization of Dielectric, Piezoelectric, and Ferroelectric Properties of 30% ScAlN Thin Films.
Article in Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
Scandium-doped aluminum nitride (ScAlN) is a promising replacement for aluminum nitride in MEMS vibration and acoustic sensors due to its higher piezoelectric coefficients, and for RF MEMS due to its enhanced piezoelectric response and ferroelectric switching capability. However, poor process conditions often lead to degraded film performance. In this work, we optimized the growth conditions of ScAlN thin films deposited by reactive pulsed-DC magnetron sputtering system by studying the impact of N
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