Evidence map›Paper›PMID 42744884›Full record

ArticleNature nanotechnology2026

Monolithic 3D integration of atomic-layer-deposited oxide semiconductors on 200-mm silicon wafers.

Chang Niu, Linjia Long, Luqi Zheng, Shuting Du, Jian-Yu Lin, Kisoo Nam, Zehao Lin, Chang Liu, Juanjuan Lu, Haiyan Wang and 2 more

Abstract read
PubMed Publisher
In one paragraph

Article in Nature nanotechnology, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

12 authors.

Chang Niu *Elmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA.ORCID http://orcid.org/0000-0003-3175-7164
Linjia Long *Elmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA.
Luqi ZhengElmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA.
Shuting DuElmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA.ORCID http://orcid.org/0009-0002-9128-7395
Jian-Yu LinElmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA.
Kisoo NamElmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA.
Zehao LinElmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA.
Chang LiuSchool of Materials Science and Engineering, Purdue University, West Lafayette, IN, USA.ORCID http://orcid.org/0009-0006-8509-3569
Juanjuan LuSchool of Materials Science and Engineering, Purdue University, West Lafayette, IN, USA.
Haiyan WangSchool of Materials Science and Engineering, Purdue University, West Lafayette, IN, USA.ORCID http://orcid.org/0000-0002-7397-1209
Haitong LiElmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA.ORCID http://orcid.org/0000-0003-3393-9252
Peide D YeElmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA. yep@purdue.edu.ORCID http://orcid.org/0000-0001-8466-9745

Funding

National Science Foundation (NSF) 2425498
6 · The paper itself

Abstract

Monolithic 3D (M3D) integration offers a pathway to overcome the scaling limits of conventional silicon complementary metal-oxide-semiconductor technology by extending dense vertical stacking of multifunctional logic and memory devices. Here we demonstrate wafer-scale M3D integration of three tiers of atomic-layer-deposited indium oxide (InO

Identifiers

PMID42744884

What OpenQuestion holds

Textmetadata
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.